JPH0635659Y2 - 可動磁石形リニア直流モータ - Google Patents

可動磁石形リニア直流モータ

Info

Publication number
JPH0635659Y2
JPH0635659Y2 JP1988053981U JP5398188U JPH0635659Y2 JP H0635659 Y2 JPH0635659 Y2 JP H0635659Y2 JP 1988053981 U JP1988053981 U JP 1988053981U JP 5398188 U JP5398188 U JP 5398188U JP H0635659 Y2 JPH0635659 Y2 JP H0635659Y2
Authority
JP
Japan
Prior art keywords
field
magnet
field magnet
motor
mover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988053981U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01159582U (en]
Inventor
文彦 今村
臣雄 津江
Original Assignee
旭化成工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭化成工業株式会社 filed Critical 旭化成工業株式会社
Priority to JP1988053981U priority Critical patent/JPH0635659Y2/ja
Publication of JPH01159582U publication Critical patent/JPH01159582U/ja
Application granted granted Critical
Publication of JPH0635659Y2 publication Critical patent/JPH0635659Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP1988053981U 1988-04-20 1988-04-20 可動磁石形リニア直流モータ Expired - Lifetime JPH0635659Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988053981U JPH0635659Y2 (ja) 1988-04-20 1988-04-20 可動磁石形リニア直流モータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988053981U JPH0635659Y2 (ja) 1988-04-20 1988-04-20 可動磁石形リニア直流モータ

Publications (2)

Publication Number Publication Date
JPH01159582U JPH01159582U (en]) 1989-11-06
JPH0635659Y2 true JPH0635659Y2 (ja) 1994-09-14

Family

ID=31279932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988053981U Expired - Lifetime JPH0635659Y2 (ja) 1988-04-20 1988-04-20 可動磁石形リニア直流モータ

Country Status (1)

Country Link
JP (1) JPH0635659Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7385679B2 (en) * 2004-12-29 2008-06-10 Asml Netherlands B.V. Lithographic apparatus and actuator
JP4979256B2 (ja) * 2006-04-05 2012-07-18 山洋電気株式会社 リニアモータ
US7701093B2 (en) * 2007-03-08 2010-04-20 Sanyo Denki Co., Ltd. Linear motor
JP2015089189A (ja) * 2013-10-29 2015-05-07 株式会社安川電機 リニアモータ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4396966A (en) * 1980-12-31 1983-08-02 International Business Machines Corporation Low mass actuator system for magnetic recording disks with half strength end poles
JPS60237854A (ja) * 1984-05-11 1985-11-26 Tokyo Seimitsu Co Ltd リニアモ−タ
JPS62198876U (en]) * 1986-06-10 1987-12-17

Also Published As

Publication number Publication date
JPH01159582U (en]) 1989-11-06

Similar Documents

Publication Publication Date Title
KR100443590B1 (ko) 리니어모터 및 그 제조방법
JP3945148B2 (ja) Xyテーブル及びxyzテーブル
EP1198055A2 (en) Linear motor, driving and control system thereof and manufacturing method thereof
US5955798A (en) Linear motor
WO2007040009A1 (ja) リニア同期モータ及びリニアモータアクチュエータ
WO2006129454A1 (ja) リニアモータ
JP4061834B2 (ja) リニアモータ
JPH0635659Y2 (ja) 可動磁石形リニア直流モータ
JP3744437B2 (ja) 駆動装置
JP2002354779A (ja) リニアモータ
JP4600858B2 (ja) リニアモータ
JP2015104200A (ja) リニアモータ
JP2004312956A (ja) リニアアクチュエータ
JPH11313475A (ja) リニアモータ
JPH10201216A (ja) リニアモータ
JP4478905B2 (ja) リニアモータ
EP4356502A1 (en) Double-sided linear motor
JP2002101636A (ja) リニアモータ
JPH1052022A (ja) 無ブラシ線型駆動制御システム
JP3975442B2 (ja) リニアモータ
JP2004336842A (ja) リニアモータ
JP4734946B2 (ja) アクチュエータ
JP4352439B2 (ja) リニアモータ
JPH037055A (ja) リニアモータ装置
JP2004289895A (ja) リニアモータ